Fabrication of CNT microarray for biosensor applications

[ABSTRACT]Microarray technology has become one of the indispensable tools which can be used to identification of bio-molecules in cells, tissues, and disease, such as disease diagnosis, prediction, prevention, and drug discovery. The major advantages of the microarray biosensor are their ability of the simultaneous analysis of thousands parameters on a single platform and minimal sample consumption. Furthermore, carbon nanotubes (CNTs) with their outstanding properties are potential material for many applications including biosensors. To increase the fluorescence detection, the microarray will be established within the three-dimensional (3D) structure. The advantage of the 3D structure CNT for microarray platform is the enhancement of active surface area without sacrificing the size of the device. For instance, the external surface area of one CNT spot is roughly ~3.14×10^-5 mm2. As arrays of 100 mm2 of CNT platform with 50 µm spacing, it can contain as many as 1.82 ×10^8 spots that is high-density microarrays. This high-density microarray is powerful tools for the screening of pharmaceuticals, investigation of biomolecule interactions and patient diagnostics. In this paper, the CNT is fabricated in microarray configuration to realize biochip sensor design. The CNT microarray was fabricated by using electron beam lithography for patterning microarray on silicon substrate, RF sputtering for deposit catalyst, and thermal plasma chemical vapor deposition (CVD) for growing vertically aligned CNT.

https://opac.ll.chiba-u.jp/da/curator/107840/

https://opac.ll.chiba-u.jp/da/curator/107840/ceresIntlSympo-24-P208.pdf

Chiba University. Center for Environmental Remote Sensing

千葉大学環境リモートセンシング研究センター

会議発表用資料

Proceedings of the CEReS international symposium = CEReS国際シンポジウム資料集

24

208

213

2016-11-21

publisher

環境リモートセンシング研究センター「CEReSシンポジウム資料集」